Page 20 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 2: Theory of Operation
Operating Sequence
a
Operating Sequence
The following section describes the VersaPort operating sequence. The operation starts
from the Home position. The VersaPort is at the Home position when the following criteria
are met.
Home Position Criteria:
• The port door is seated to the port plate (Pod-door closed interlock and elevator
limit switches are closed).
• The Pod latches are retracted.
• The wafer seater is retracted.
• The READY indicator is lighted.
Staging Sequence
CAUTION
DURING NORMAL OPERATION, ONCE A CYCLE IS STARTED,
THE POD TOP IS LOCKED TO THE PORT PLATE AND CANNOT
BE REMOVED. DO NOT TRY TO REMOVE IT. FAILURE TO
COMPLY MAY RESULT IN DAMAGE TO THE PORT PLATE
AND/OR POD, POSSIBLE LASER EXPOSURE, AND CREATE A
PINCH HAZARD.
1. The Process Tool sends a OPEN (Stage) command to the VersaPort. The VersaPort
raises the port plate and Pod top to the configured Stage position, exposing the
cassette. While the port plate is rising, the attached laser system maps the wafers in
the cassette, so they can be extracted by the Process Tool’s Z-axis robot.
2. If the optional cassette shuttle is installed, the port door with cassette attached moves
horizontally toward the Process Tool to position the cassette for wafer transfer.
3. When the wafer transfer sequence is complete, a CLOSE (Home) command is sent
to the VersaPort. The port door retracts to its Home position (if shuttle installed) and
the elevator lowers the port plate and Pod top over the cassette. The Pod is unlocked
from the port plate.
Self Test
Verify that the VersaPort can perform a complete self-test without any errors.
1. With ISIM, use F10 (Main), F2 (Manual), F3 (Self-Test) keys to start the self-test.
Upon completion of a successful self-test, the following message appears: ERRORS
FOUND DURING SELF-TEST: NONE
To Next Page
Loading...