Released Rev. C 2000-1252-01 Page 71
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
_____3. When the beam is centered in the wafer protrusion mirror, tighten the bottom
screw with spring until the coils just touch (see Figure 21 on page 67). Do not
over-tighten.
_____4. Check to see that the beam is still centered on the protrusion mirror. If
necessary, adjust the beam again using the two adjustment screws- not the
screws with spring.
_____5. Tighten the top screw with springs until the coils just touch.
_____6. Check again to verify the beam is still centered on the protrusion mirror. If
necessary, make any small adjustments with the two adjustment
(non-springed) screws. Loosen the springed screws and repeat the
adjustment if beam is not centered on wafer protrusion mirror.
_____7. Verify both bottom and top screws with springs are tight.
Adjust Wafer Protrusion Sensor
WARNING
LASER HAZARD
LASER RADIATION PRESENT WHEN POWER APPLIED AND
INTERLOCK DEFEATED. AVOID DIRECT EYE EXPOSURE.
_____1. At the PC:
_____a. From the MANUAL Menu select F5 (GOTO POS).
WARNING
MECHANICAL HAZARD
A PINCH HAZARD EXISTS AT THE PORT PLATE AS IT LOWERS
TO THE PORT DOOR. KEEP HANDS AWAY FROM THE PORT
PLATE PATH
_____b. At the Target Pos (inch) line, enter 2.8. Press Enter three times to accept
the Speed and Acceleration values and move the port plate to a position
2.8 inches above the port door.
_____2. Select F4 (DAC menu). Use the arrow keys to select Sensor Alignment and
press Enter.
_____3. From the SENSOR ALIGNMENT Menu, use the arrow key to select Protrude
Sensor.
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