Asyst Technologies VersaPort 2200 - Calibration;Alignment Procedures

Released Rev. C 2000-1252-01 Page 45
VersaPort 2200 Technical Manual
Chapter 3: Diagnostics and Troubleshooting
Problem Identification
a
Problem Identification
NOTE . . .
ISIM IS ONLY TO BE USED BY TRAINED OPERATORS AND TECHNICIANS.
CONTACT ASYST TECHNOLOGY FOR TRAINING.
T
ABLE 5 General Problems
Indication/Problem Possible Causes Solutions
Indication: No
indicator lights on the
port plate.
The VersaPort is not connected to
power.
The Process Tool is not turned on.
Malfunction on the VersaPort printed
circuit board. (Ensure Process Tool has
power and VersaPort power cord is
attached.)
Connect the 24 VDC power.
Apply power to the Process Tool.
Check the 24 V on the VersaPort board.
Check status cable,
Perform CSP6 – “Replace Printed Circuit
Board” on page 116
Indication: The
POWER light is
lighted, but the
READY light will not
light.
The VersaPort is busy processing a
command.
VersaPort not at Home position.
Wait for the VersaPort to perform the
command.
Check to ensure that VersaPort is fully in
Home position.
Indication: The
POD-IN-PLACE light
will not light when a
Pod is placed on the
VersaPort port plate.
The Pod is not properly seated on the
port plate.
Electronic problem.
Pod-in-Place switch is not properly
aligned.
Ensure that the Pod is sitting flat on the port
plate in the proper orientation.
Check signal cables.
Perform CAP6 – “Align Pod-In-Place
Switch” on page 94
Indication: Vers aPo rt
halts and alarms.
1. Position Following Error caused by
any of the following:
Loose elevator drive belt
Bad elevator motor bearings
Bad pulley bearings
Defective elevator motor
Defective encoder assembly
Intermittent encoder cable
Defective Inx/Control interface board
Brake engaged
Limit Sensors defective
2. Laser, Mirror or sensor is loose and
moves while VersaPort is in motion.
3. Wafer protrusion sensor tripped.
1. Solution:
Replace or tighten belt.
Replace elevator motor.
Replace pulley.
Replace elevator motor.
Replace encoder.
Replace encoder cable.
Replace VersaPort/Control interface board.
Replace brake.
Replace limit sensors.
2. Laser system needs alignment. Perform
Laser Alignment.
3. Verify that the wafers are properly seated
in the cassette.