Released Rev. C 2000-1252-01 Page 1
a
Preface
Introduction
This manual describes the Asyst VersaPort 2200 product line, which includes the
following:
Core Products
• VersaPort Platform Mount Standard. This version of the VersaPort can be
configured for operation mounted to a Process Tool platform or mounted to a
SEMI-standard BOLTS interface frame. The Standard VersaPort has a fixed port
door.
• VersaPort Platform Mount Shuttle. This version can be configured for operation
mounted to a Process Tool platform or mounted to a SEMI-standard BOLTS
interface frame. The Shuttle VersaPort has a horizontal shuttle.
Options
• BOLTS Interface. The SEMI-standard BOLTS interface frame can be used with
either of the core products above and, optionally, one
of the options below.
• Reticle option
• RFID option
• MOCA
NOTE . . .
THE RETICLE, RFID, AND MOCA OPTIONS CAN BE USED WITH EITHER
P
LATFORM MOUNT—STANDARD OR SHUTTLE—OR WITH THE VERSAPORT
MOUNTED TO A BOLTS INTERFACE. THE OPTIONS, HOWEVER, CANNOT BE
USED SIMULTANEOUSLY WITH EACH OTHER (I.E., THE RETICLE OPTION CANNOT
BE USED WITH THE MOCA, AND SO FORTH).
The VersaPort port door has provisions to support a copper interlock with the use of kit
P/N 9700-5836-01, sold separately.
Audience
This manual should be used by trained operators, service technicians and engineers to
set up, operate, and perform service and maintenance on the Asyst VersaPort 2200.