Asyst Technologies VersaPort 2200 - Figure 40 F5 - STATUS Menu; Table 14 Status Menu

Released Rev. C 2000-1252-01 Page 129
VersaPort 2200 Technical Manual
Appendix A: ISIM
Indexer Simulator (ISIM) Menu List
a
FIGURE 40 F5 – STATUS Menu
T
ABLE 14 Status Menu
F Key Main Menu F Key Sub Menu Menu Options Explanation
F5
STATUS F1 ARE YOU
THERE
Sends S1, F1, message and gives S1,
F2 reply.
F2 LOOPBCK DIAG Sends S2, F25 message and gives S2,
F26 reply.
F3 INDEX STATUS Sensor Status
Software Part
No.
Wafer Map
Status
History data
F4 READ PIO Sends S2, F41, gives status of PIO 1C,
2A, 2B
F5 SERVO TUNING RP? Not available in released versions
kd?
Si?
Ri?
Il?