Released Rev. C 2000-1252-01 Page 65
VersaPort 2200 Technical Manual
Chapter 4: Service
CAP1 – Align Laser Detector System
a
Service
WARNING
LASER HAZARD
LASER RADIATION IS PRESENT WHEN POWER IS APPLIED AND
INTERLOCK DEFEATED. ISIM MANUAL MODE OPERATION WILL
EXPOSE THE SERVICE TECHNICIAN TO LASER RADIATION.
AVOID DIRECT EYE EXPOSURE TO BEAM.
Adjust Laser Beam Orientation
_____1. Connect a PC with null modem cable to the Host port of the VersaPort.
Connect 24vdc power. Use ISIM software to test the operation of the
VersaPort. For information on using the software, see “Appendix A: ISIM” on
page 123.
_____a. From the Main menu select F9 (SMIF OPTION). Use the arrow keys to
select LPO/VersaPort and press Enter.
_____2. The VersaPort should be at a height that allows access to the laser bracket
mounted to the bottom of the port plate. Raise the port plate;
_____a. From the Main menu select F2 (MANUAL).
_____b. From the Manual menu select F5 (GOTO POS)
_____c. At the dialog box, enter “10” on the Target Pos (inch) line. Press Enter
three times to accept Speed and Acceleration values and raise the port
plate ten inches.
_____3. Verify the laser beam is properly oriented to the sensor:
_____a. From the MANUAL Menu select F4 (DAC).
_____b. From the DAC Menu, use the arrow key to select Sensor Alignment.
_____c. From the SENSOR ALIGNMENT Menu, use the arrow key to select Wafer
Sensor.
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