Page 46 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 3: Diagnostics and Troubleshooting
Problem Identification
a
Indication: During an
unload operation, the
VersaPort halts and
alarms. The VersaPort
is halted and no reticles
appear to be
over-extended.
Excessive wafer protrusion sensor
needs adjustment or replacement.
Refer to CAP2 – “Align Excessive Wafer
Protrusion Sensor, Vertical View” on
page 76.
Indication: The
VersaPort has power,
but nothing happens.
1. The communications cable is
missing or not plugged into the proper
connector on the VersaPort.
2. VersaPort is not properly configured
for use with a computer.
3. During servicing, the VersaPort was
placed in MANUAL mode and was not
returned to AUTO mode prior to
operation.
4. The VersaPort PCB needs
replacement.
5. Software is locked.
1. Attach the communication cable to the
proper VersaPort connector and tighten the
connector hold-down screws.
2. Using ISIM software, from the Main
Menu,
select Config Menu. Select
Read Configuration.
Verify correct configuration for VersaPort to
communicate. (Refer to “ECID
Descriptions” on page 161.)
3. Using ISIM software or commands from
the Host tool, place the VersaPort in AUTO
mode.
4. Perform CSP6 – “Replace Printed
Circuit Board” on page 116.
5. Cycle the power to reset the unit.
TABLE 5 General Problems (Continued)
Indication/Problem Possible Causes Solutions
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