Page 32 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
Chapter 2: Theory of Operation
VersaPort Components
a
• Stage. The number of times the VersaPort elevator has been driven to the stage
position.
• Home. The number of times the VersaPort elevator has been driven to the Home
position.
• Map. As the port plate moves to Stage, the cassette is mapped. Mapping
performs three functions:
a. Wafer status (presence or absence of wafers).
b. Cassette slot positions.
c. Wafer positions.
• Recoverable errors. This is the total number of recoverable errors recorded.
• Non-recoverable errors. This is the total number of non-recoverable errors
recorded.
• Last Error. This is the error code of the most recently occurring error condition in
the VersaPort. The value of the Last Error cannot be cleared by cycling power to
the VersaPort. It can only be over-written by the error code of a new error
condition.
• Elevator motor position. This is the current position of the elevator, in case of
power failure, at any moment in time.
• Elevator motion status. This indicates, in case of power failure, whether the
elevator was in motion at the moment when the power was interrupted.
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