Released Rev. C 2000-1252-01 Page 49
VersaPort 2200 Technical Manual
Chapter 3: Diagnostics and Troubleshooting
Error Types
a
Alarm Code S5,F1
5 = Fatal (non-recoverable)
6 = Warning (recoverable)
Alarm ID, alarm occurs during S5,F1
1 = Move to stage
2 = Return Home
4 = Tweek up or down
8 = Get reticle map
32 = Port lock or unlock
34 = Move to a specified position
35 = Move to the next reticle
36 = Move to the next slot
37 = Others
Error Messages
See Table 6 on page 50 and Table 7 on page 50 for a description of error messages.
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