HYBRID Coater Service Manual ver1.1 Chapter 10
89
HC-100-SS-34 Calibrating plate
HC-100-SS-53 XY Stepper motor. For HC-200 also
for Z and Phi
HC-100-SS-58 Coupling set between stepper motor
and spindle (X and Y motor)
KS-0013 O-ring for mounting valve assembly
at head