Chapter 10 HYBRID Coater Service Manual ver1.1
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KS-3021 Cap for closing opening off HC-
1050/51 pressure regulator
PN-5040 Pneumatic crane at head
VP-0008 Alvania EP-2 grease for bearings
VP-0089 Adapter for high pressure grease pump
VP-0091 High pressure grease pump
HC-100 Specific
Part No. Description
EL-00578 Camera
EL-00585 Lens camera
EL-04879 PCB Dispense Head HC-100
HC-100-2407 Diaphragm
HC-100-SS-54 Z stepper motor
HS-100-2508 Diffuser