HYBRID Coater Service Manual ver1.1 Chapter 10
91
HC-200 Specific
Part No. Description
AM-1005 Drive belt Phi motor
AM-1006 Drive belt Z motor
EL-00578 Camera
EL-00584 Lens
EL-03074 Gearbox for Phi motor
EL-07183 Three channel encoder module (in combination with the HC-200-SS-80)
HC-200-SS-80 Encoder disk 2” 2500 lines with
index (in combination with the EL-
07183)
HC-100-4808 Closing plate for placement when
HC-1000 / HC-1010 is removed
HC-100-SS-51 Flexible cable duct ( please contact
DIMA before ordering)
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