SCU-1601 Control Unit for Turbomolecular Pump
Battery for clock
function
Lithium battery (3 V, 130 mAhr)
Serial communication function
(Push-button switch•Green)
(Push-button switch•Dark Grey)
(Push-button switch•Grey)
(Push-button switch•Grey)
(Push-button switch•Grey)
(Push-button switch•Grey)
(Push-button switch•Grey)
(2 lines of 20 characters)
Electromagnetic bearing failure detection
STP pump overheat detection
Motor driver overload detection
STP pump overspeed detection
STP control unit overheat detection
TMS unit failure detection