Edwards SCU-1601

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SCU-1601 Control Unit for Turbomolecular Pump

MT-96E-1B1-0

Page 13

TECHNICAL DATA

Figure 11 - SCU-1601 dimensions (mm)

Note: The size of the attached screws for the rubber feet is M4×12.

Main Page

Table of Contents7
Introduction15
Scope and Definitions15
Electromagnetic Compatibility16
Limited Warranty17
Item Warranted17
Disclaimer17
Spare Parts18
Labels18
Label Affixing Positions20
General Description21
Cable Sets22
Technical Data25
SCU-1601 Specifications25
Installation29
Unpacking29
Front Panel29
Rear Panel32
Precautions before Installation33
Operating Environment33
Insulation Test33
Installation Area34
Attaching the SCU-1601 to a Rack35
Cable Connection36
STP Connection Cable37
STC-U Remote Branch Cable38
STC-U Remote Cable39
Power Extension Cable40
Power Cable41
Connecting to Semiconductor Equipment44
Connecting to Power44
Emergency off Circuit (EMO Circuit)44
Remote Communication45
Parallel Communication45
Serial Communication45
Adjustment Methods46
Tuning46
Tuning Method46
Change of Data after Tuning49
Confirmation Mode50
Confirmation Method50
Parameter Set Mode53
Remote Operation Setting53
Rotational Speed Setting53
TMS Function Setting53
Rotational Inhibit Signal Setting53
Second Speed Option Setting53
Second Speed Setting53
Optional Output Signal Setting (Emergency Vent Valve Setting)54
Second Damage Limit Setting54
Warning Function Setting55
3.11.10 Serial Port COM1 Setting56
3.11.11 Serial Port COM2 Setting56
3.11.12 Date/Time Setting56
3.11.13 Edcentra Setting56
3.11.14 Factory Setting56
3.11.15 Parameter Setting Procedure57
Manual Operation Mode64
Operation67
Before Starting the STP Pump67
Confirmation before Starting67
Confirmation of Vacuum System67
Powering on68
Self Test68
CAUTION" Message in the Self Test State68
How to Start/Stop the STP Pump69
Manual Start/Stop the STP Pump69
Starting the STP Pump69
Stopping the STP Pump69
Starting the STP Pump after Stopping70
Remote Operation72
Input Signal Pins72
Output Signal Pins76
Remote Setting80
Starting/Stopping the STP Pump80
Rotation INHIBIT Signal81
Second Speed Option82
Starting the STP Pump after Stopping84
Starting the STP Pump after a Safety Function Operates84
Powering off84
Operating the TMS Unit (for Use with the TMS Unit)85
Before Starting85
Starting/Stopping85
Setting the TMS Unit Function85
Temperature Control85
Serial Communication Protocol87
Introduction87
Connection and Setting up88
Signal Connection88
Connecting the RS48590
Communication Parameter Setting92
Recommended Items about Communication Cable Installation93
Protocol Specifications96
General Description96
Standard Transmission Frame (in the RS232/RS485 Single Point Connection)97
Control Command98
(In the RS232/RS485 Single Point Connection)98
Query Command99
(In the RS232/RS485 Single Point Connection)99
Transmission Data Format100
Frame Control (Checksum)100
Error Control101
Transmission Frame in the RS485 Multi-Point Connection101
Control Command in the RS485 Multi-Point Connection102
Query Command in the RS485 Multi-Point Connection104
Broadcasting Command in the RS485 Multi-Point Connection105
Application Note106
Command Specifications110
Command List110
Readmeas111
Command111
Readfailmess112
Readmodfonct115
Readversion117
Readcounters118
Readsetpoint119
Readmotortemp119
Readstatus120
Readevents121
Setspeedsetpoint122
Readspeedsetpoint123
Readmodfonctwithwarning124
Readmeasvalue127
Setoptions129
Second Speed Option Setting130
Second Speed Selection131
Readoptions132
Second Speed Function Setting133
Second Speed Select134
External TMS Unit Setting135
External TMS Temperature138
Stp-Link141
Edcentra143
Maintenance145
Safety Functions145
Power Failure145
Operation after a Power Recovery146
Abnormal State of Magnetic Bearing147
Excessive Vibration147
Motor Driver Overload147
Overheating Inside the STP Pump147
Overheating Inside the SCU-1601147
Overspeed148
Abnormality/Error in the TMS Unit (for Use with the TMS Unit)148
WARNING" Message Function149
WARNING" Message Display Function149
WARNING" Message Description150
Damage Point Function150
First Damage Limit150
Second Damage Limit150
Imbalance X_H, X_B, Z150
Pump Run Time over151
Pump Overload151
Low RTC Battery152
Much Motorcurrent152
WARNING" Function Setting153
Error at Self Test State154
Error after Self Test155
Error Messages155
Troubleshooting Immediately after Power Failure Occurs155
Troubleshooting Immediately after Other Abnormality/Errors Occur156
When Error Message Is Not Displayed on LCD165
Abnormalities When Powering on165
Abnormalities When Performing Rotational Operation165
Other Abnormalities166
Error Record" Message Display Function166
Maintenance and Inspection167
Cleaning167
Maintenance168
Storage, Transportation and Disposal169
Storage of the SCU-1601169
Transporting for Repair or Overhaul169
Disposal170
Service, Spares and Accessories171
Introduction171
Service171
Spares171
Accessories172

Edwards SCU-1601

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