Edwards SCU-1601 User Manual

Declaration of Conformity
This product has been manufactured under a quality management system certified to ISO9001:2015.
This declaration is based on the requirements of ENISO17050-1 and the relevant directives.
VI-DOC-96-001
Edwards Japan Limited
1078-1,Yoshihashi,
Yachiyo-shi
Chiba, 276-8523
Japan
Documentation Officer
Innovation Drive
Burgess Hill
West Sussex
RH15 9TW
UK
documentation@vt.atlascopco.com
This declaration of conformity is issued under the sole responsibility of the manufacturer.
Product Name:
Control unit for turbomolecular pump
Model Number:
SCU-1601 series
The object of the declaration described above is in conformity with relevant statutory requirements:
Electrical Equipment (Safety) Regulations 2016
Electromagnetic Compatibility Regulations 2016
Class A Emissions, Industrial Immunity
Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment Regulations 2012
Relevant designated standards or technical specifications are as follows:
EN 61010-1:2010 +A1:2019
Safety requirements for electrical equipment for measurement, control and
laboratory use. General requirements
EN 61326-1:2013
Electrical equipment for measurement, control and laboratory use. EMC
requirements. General requirements. Class A Emissions, Industrial Immunity
This declaration, based on the requirements of the listed Directives and EN ISO/IEC 17050-1, covers all product
serial numbers from this date on: 13
th
-Apr-2023
You must retain the signed legal declaration for future reference
This declaration becomes invalid if modifications are made to the product without prior agreement.
Signed for and on behalf of Edwards Ltd
Tanya Palmer
Vice President, Engineering, Semiconductor Chamber
Solutions
Chelmsford
Petr Tochacek
General Manager, PC Yachiyo
Yachiyo

Edwards SCU-1601 Specifications

General

Brand	Edwards
Model	SCU-1601
Category	Control Unit
Language	English