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Edwards STP-iS1607 Series User Manual

Edwards STP-iS1607 Series
173 pages
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STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page iv
PAGE
iv
CONTENTS (CONTINUED)
Section Title Page
7 SAFETY FUNCTIONS 133
7.1 Safety functions 133
7.1.1 Power Failure 133
7.1.2 Operation after a power recovery 134
7.1.3 Abnormal state of magnetic bearing (Disturbance) 135
7.1.4 Excessive vibration (Disturbance) 135
7.1.5 Motor driver overload (DRV Overload) 135
7.1.6 Overheating inside the STP pump (MOTOR Overheat) 135
7.1.7 Overheating inside the control unit (CNT Overheat) 135
7.1.8 Overspeed 136
7.2 "WARNING" function 136
7.2.1 "WARNING" function 136
7.3 Contents of WARNING function 138
7.3.1 First Damage limit 138
7.3.2 Second Damage Limit 138
7.3.3 Pump run time over 138
7.3.4 Pump Overload 139
7.3.5 Imbalance 139
7.3.6 Other Warning 139
7.4 WARNING function setting 140
7.5 Troubleshooting immediately after failure occurs 141
7.5.1 After power failure 141
7.5.2 After other abnormality/error 141
7.6 Troubleshooting 142
7.6.1 Indication of "FAILURE" LED (red) 142
7.6.2 Indication of "FAILURE" LED (green) 148
7.6.3 No Indication of the "FAILURE" LED 148
8 MAINTENANCE AND INSPECTION 149
8.1 Maintenance and inspection 149
8.2 Cleaning 150
8.3 Inspecting the deposit 150
8.4 Maintenance 151
8.4.1 Recommended overhaul intervals 151
8.4.2 Standard replacement parts 151
8.4.3 Recommended maintenance intervals for main parts 152
8.5 Transporting for repair or overhaul 153

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Edwards STP-iS1607 Series Specifications

General IconGeneral
BrandEdwards
ModelSTP-iS1607 Series
CategoryWater Pump
LanguageEnglish

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