STP-iS1607 Series Turbomolecular Pump
SERIAL COMMUNICATION PROTOCOL
Serial communication time out
setting (Unit: sec.)
16-bits hexadecimal
coded ASCII
88-bits hexadecimal
coded ASCII
Input operation port setting
I/O REMOTE (X2 REMOTE): 01
hex
COM1 (X3 COM1): 02
hex
STP-LINK (X5 STP-LINK): 06
hex
TMS Option
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
Second Damage Limit Option
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
First Damage Limit Warning
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
Pump Runtime Over Warning
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
Pump Runtime Over Warning
Hours setting
0 to 1,000×100 hours
(00000000
hex
to 000003E8
hex
)
Imbalance Warning
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
Pump Overload Warning
Enable/Disable setting
00
hex
: ENABLE
FF
hex
:DISABLE
Pump Overload Warning
Motor current setting
0 to 1,000×0.1 %
(0000
hex
to
03E8
hex)
Pump Overload Warning
Rotational speed setting
0 to 1,000×0.1 %
(0000
hex
to 03E8
hex
)
Serial communication
time out setting
0 to 30,000sec.
(0000
hex
to 7530
hex
)
Round down to the 60 seconds
Set to 0 to disable function
*1
Valid only with TMS specification
Table 29 - Parameter setting value