Edwards STP-iS1607 Series - Page 54

STP-iS1607 Series Turbomolecular Pump
MT-94E-001-C
Page 40
3
INSTALLATION OF THE STP PUMP
1.
Vacuum equipment
2.
Inlet port flange
3.
Washer
4.
Torque reduction mechanism
5.
Bolt insert position
Figure 21 - Bolt position for securing the flange
2 1 5
1
2
5
4
3