Keysight E4981A 120 Hz/1 kHz/1 MHz Capacitance Meter 251
Technical Information
Basic Principles of Capacitance Measurement
Guarding when measuring small capacitance
When measuring small capacitance values, for example those of
small-capacitance chip capacitors, use a guard plate to minimize
measurement errors caused by stray capacitance. Figure E-11 shows an
example of using a guard plate with the measurement contacts of a
four-terminal pair structure.
Figure E-11 Example of connecting guard plate to DUT