46 Chapter 4
Performing Measurements
To perform continuous spot-scan measurements
1 Follow the instructions above for a single Spot Scan. In the System
Control Area, click to enable Continuous Scan mode.
2 Optional: If Data Logging is desired, select Options > Spot Scan >
Logging Enabled. (A check mark in the menu indicates that Logging
is On or Enabled.)
Select Options > Spot Scan > Set Logging Options. In the dialog box which
appears, browse to select the directory for logged data. Enter a file prefix and
click OK. A separate data file will be saved for each Spot Scan in the selected
directory.
3 In order to display Continuous Spot Scans in the lower graph, turn the
vertical cursors on in the upper graph. (See “To update the lower graph”
on page 67.) Drag the yellow cursor to the Spot Scan region.
Alternatively, you can press the spot scan lock button to lock the
spot scan cursor to the active vertical cursor. (See “Spot Scan Cursor
Unlocked or Locked Toggle Button:” on page 74.)
4 Click the Spot Scan button to start continuous scanning. This button
will turn gray during continuous scanning. Continuous Spot Scans will
appear in the lower graph.
5 To stop scanning, press the grayed Spot Scan button again
Extended Range Spot Scan Mode
Just as with spot scans in regular mode, this method of scanning provides measure-
ment data over a sub-section (more than 85 m) of the extended range scan in a
fraction of the time it takes to perform a standard extended range scan. The scan
rate in this mode is set to 10 nm/s, with Fast Scanning currently disabled in this
mode. Larger
wavelength
range scans are
available
when
performing
spot scans. This
provides measurement data with a 4x increase in spatial resolution. The Extended
Range mode allows the user to scan devices out to 2 kilometers in length. Extended
Range Spot Scans may be performed in both the Single Scan and
Continuous
Scan
modes.
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