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Keithley 4225-PMU
Tektronix Keithley 4225-PMU User Manual
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Specifications are subject to change without notice.
All Keithley trademarks and trade names are the property of Keithley Instruments.
All other trademarks and trade names are the property of their respective companies.
Keithley Instruments • 28775
Aurora Road • Cleveland, Ohio 44139 • 1-800-833-9200 • tek.com/keithley
04/2022
186
Table of Contents
Table of Contents
6
Introduction
10
Models 4220-PGU and 4225-PMU
10
Connections
12
Introduction
12
Connection Guidelines
12
PMU Common Connections
13
Shield Connections
13
Cable Length
14
High Frequency Connections
14
Prober Chuck Connections
15
PGU and PMU Connectors
15
Model 4225-RPM
16
RPM Input, Output, and Top Panels
16
Connecting the RPM to the PMU
17
Mounting the RPM
19
RPM Diagrams for Local and Remote Sensing
19
Using the RPM as a Switch
20
Two-Terminal Device Connections
21
Three-Terminal Device Connections
23
Four-Terminal Device Connections
24
Pulse Source-Measure Connections
26
Pulse Generator Connections
26
Using an Adapter Cable to Connect Pulse Card to DUT
27
Connections to Prober or Test Fixture Bulkhead Connectors
27
RPM Connections to DUT
28
Two-Terminal Test Connections
28
Remote Sensing Using RPM Connections to a Prober
29
PMU Connection Compensation
31
Short Compensation
31
Offset Current Compensation
32
Perform Connection Compensation
32
Enabling Connection Compensation
33
Load-Line Effect Compensation (LLEC) for the PMU
35
Methods to Compensate for Load-Line Effect
36
How LLEC Adjusts Pulse Output to the Target Levels
36
Coping with the Load-Line Effect
38
LLEC Maintains Even Voltage Spacing
38
Test Considerations
39
LPT Functions Used to Configure LLEC
40
Enable LLEC
40
Disable LLEC and Set the Output Impedance
41
Setting up Pmus and Pgus in Clarius
42
Introduction
42
Configure the PGU, PMU, and RPM Using Tests
42
Create a PMU Project
43
Configure the Tests
44
PMU Operation Modes
46
PMU - All Terminal Parameters
47
Start (PMU Amplitude Sweep)
47
Stop (PMU Amplitude Sweep)
47
Step (Pulse Amplitude Sweep)
48
Points
48
Base
48
Amplitude
48
Dual Sweep (Pulse)
49
Force Range (PMU)
49
Disable Outputs at Completion
49
Current Spot Mean High
50
Current Spot Mean Low
50
Measure Current Range (PMU)
50
Low Range
51
Current Sample Waveform
51
Voltage Spot Mean High
52
Voltage Spot Mean Low
52
Voltage Sample Waveform
52
Report Timestamps
52
Report Status (PMU)
53
PMU Measurement Status
53
Compensation Short Connection
56
Load Line Effect Compensation
56
DUT Resistance (R DUT)
56
Max Voltage Estimator
56
Threshold Current
56
Threshold Voltage
57
Threshold Power
57
PMU Test Settings
57
Pulse Settings
57
Timing Parameters
61
PMU Advanced Test Settings
63
PMU Capacitive Charging/Discharging Effects
76
PMU and RPM Measure Ranges Are Not Source Ranges
78
4220-PGU and 4225-PMU Output Limitations
79
Configure the PGU, PMU, and RPM Using Tests
79
Step or Sweep Multiple Device Terminals in the same Test
80
Basic Troubleshooting Procedure
82
Step 1. Verify Prober Connections from the PMU or RPM to the DUT
82
Step 2. Verify the Pulse Shape
83
Step 3. Is the Pulse Level Correct for each Channel
84
Step 4. Is the Pulse I-V Curve Suspect
84
Pulse Card Concepts
90
Models 4220-PGU and 4225-PMU
90
PMU Block Diagram
91
Pulse Modes
92
Pulse Measurement Types (PMU)
92
Measure Modes
93
4200A-SCS Power Supply Limitations
94
Pulse Source-Measure Concepts
97
Ultra-Fast I-V Tests
97
Sample Rate
99
Segment Arb Waveform
100
Pulse Waveforms for Nonvolatile Memory Testing
105
Waveform Capture
106
DUT Resistance Determines Pulse Voltage Across DUT
106
Triggering
111
Measurement Types
114
Spot Mean Measurements
115
Spot Mean Discrete Readings
115
Spot Mean Average Readings
116
Waveform Measurements
116
Waveform Discrete Readings
117
Waveform Average Readings
118
Measurement Timing
119
Kpulse (for Keithley Pulse Cards)
122
Keithley Pulse Application
122
Starting Kpulse
122
Kpulse Setup and Help
123
Triggering
124
Standard Pulse Waveforms
125
Segment Arb Waveforms
127
Exporting Segment Arb Waveform Files
129
Custom File Arb Waveforms (Full Arb)
130
Custom Arb File Operation: Select and Configure Waveforms
131
Custom Arb File Operation: Copy Waveforms into Sequencer
132
Custom Arb File Operation: Load Waveform and Turn on Output
133
Waveform Types
134
Use the RPM to Switch the SMU, CVU, and PMU
142
Introduction
142
Included Accessories
143
Equipment Required
144
Update the RPM Configuration in Kcon
144
Device Connections
145
Connection Schematic
145
Connect the 4200A-SCS to the DUT
146
Set up the Measurements in Clarius
147
Create a New Project
147
Add a Device
148
Search for and Select Existing Tests in the Test Library
149
Configure the Vfd Test
150
Configure the CV-Diode Test
152
Configure the Pulse-Diode Test
154
Run the Test
156
View and Analyze the Test Results
156
PMU for Pulsed I-V Measurements on a MOSFET
158
Introduction
158
Equipment Required
159
Device Connections
159
Connection Schematic
160
Set up the Measurements in Clarius
161
Create a New Project
162
Search for and Select an Existing Test
162
Configure the Test
163
Run the Test and Analyze the Results
165
Testing Flash Memory
168
Flash Connection Guidelines
168
Programming and Erasing Flash Memory
169
Endurance Testing
174
Connections for Endurance Testing - no Switching Matrix
175
Connections for Endurance Testing - Switching Matrix
177
Disturb Testing
178
Connections for Disturb Testing
178
Using a Switching Matrix
180
Use Kpulse to Create and Export Segment Arb Waveforms
180
Enter Segment Arb Values into UTM Array Parameters
182
Direct Connections to Single DUT
183
Direct Connections to Array DUT for Disturb Testing
185
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Tektronix Keithley 4225-PMU Specifications
General
Brand
Tektronix
Model
Keithley 4225-PMU
Category
Computer Hardware
Language
English
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