Ulvac GI-M2 - Ext-I;O Connector

12
3.5. EXT-I/O Connector
Fig. 3-5 Input/output connector pin assignment
Term
inal
No.
Signal identification
Termi
nal
No.
Signal identification
1
ＳＥＴ１ ＣＯＭ
(OUT-PUT)
26
ＳＥＴ２ ＣＯＭ
(OUT-PUT)
2
ＳＥＴ１ ａ
contact
(OUT-PUT)
27
ＳＥＴ２ ａ
contact
(OUT-PUT)
3
ＳＥＴ１ ｂ
contact
(OUT-PUT)
28
ＳＥＴ２ ｂ
contact
(OUT-PUT)
4
29
5
ＥＸＴ－ＯＵＴ ＣＯＭ
(OUT-PUT)
30
PRESSURE
･
DATA
＿＿＿＿
E
Ａ－b0
E
(OUT-PUT)
6
POWER
A
＿＿
E
ON
E A ／
OFF
(OUT-PUT)
31
PRESSURE
･
DATA
A
＿＿＿＿
E
Ａ－b1
E (OUT-PUT)
7
FILAMENT
A
＿＿
E
ON
E A ／
OFF
(OUT-PUT)
32
PRESSURE
･
DATA
A
＿＿＿＿
E
Ａ－b2
E
(OUT-PUT)
8
EMISSION
※１）
A
＿＿＿
E
Em-Hi
EA ／
Em-Lo
(OUT-PUT)
33
PRESSURE
･
DATA
A
＿＿＿＿
E
Ａ－b3
E
(OUT-PUT)
9
UNIT
A
＿＿
E
Pa
E A
(OUT-PUT)
34
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｂ－b0
E
(OUT-PUT)
10
DEGAS
A
＿＿
E
ON
E A ／
OFF
(OUT-PUT)
35
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｂ－b1
E
(OUT-PUT)
11
EMISSION
･
VALID
A
＿＿
E
OK
E A ／
NG
(OUT-PUT)
36
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｂ－b2
E
(OUT-PUT)
12
DATA
･
VALID
A
＿＿
E
Lo
E A ／
Hi
(OUT-PUT)
37
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｂ－b3
E
(OUT-PUT)
13
PRESSURE
･
DATA
A
＿
E
－
EA／ ＋ (OUT-PUT)
38
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｃ－b0
E (OUT-PUT)
14
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｃ－b3
E
(OUT-PUT)
39
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｃ－b1
E
(OUT-PUT)
15
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｄ－b0
E
(OUT-PUT)
40
PRESSURE
･
DATA
A
＿＿＿＿
E
Ｃ－b2
E
(OUT-PUT)
16
41
17
DEGAS
A
＿＿
E
ON
E A ／
OFF
(IN-PUT)
42
ＬＯＣＡＬ／
＿＿＿＿＿＿
ＲＥＭＯＴＥ
(IN-PUT)
18
EXT-PROTECT
＿＿
E
ON
E A ／
OFF
(IN-PUT)
43
FILAMENT
A
＿＿
E
ON
E A ／
OFF
(IN-PUT)
19
EXT- 5V INPUT-COM
(IN-PUT)
44
EMISSION
※２）
A
＿＿＿
E
Em-Hi
E A
／
Em-Lo
(IN-PUT)
20
EXT-24V INPUT-COM
(IN-PUT)
45
FILAMENT
A
＿
E
２
E A／ １ (IN-PUT)
21
46
REC-HOLD A
＿＿
E
ON
E A ／ OFF
X-RAY
※３）
(IN-PUT)
22
47
23
ＧＮＤ
48
ＧＮＤ
24
ＧＮＤ （ＲＥＣ－ＯＵＴ － ）
49
ＧＮＤ
25
ＲＥＣ－ＯＵＴ ＋
(OUT-PUT)
50
• A, B, C and D in PRESSURE DATA A-b0 and later correspond to «A. B × 10 ± DC» of the
indicator. Refer to ″10. EXTERNAL INNPUT/OUTPUT″ for more information.
• Digital output common is pin 5 by standard setting.
• The digital input power is the internal power by standard setting.
• Digital input common is 23, 24, 48, and 49.
•
A
＿
E
□
EA
of signal identification (e.g.
A
＿＿
E
ON
E A
) indicates the LOW status (short, negative logic).
※１） Em-Hi： １ｍA(GI-M2)、５ｍA(GI-N8) 、 Em-Lo：10μA（GI-M2）、0.5mA(GI-N8)
※２） Use it only in GI-N8.
※３） As for REC-HOLD, GI-M2/GI-D7, X-RAY are functions in GI-N8.
125
50
26