Ulvac GI-M2 - Reading the Emission Valid; Signal; Setting the Sensitivity; Point

68
11.4.5. Reading the emission valid signal
Command
Parameter
Response
Explanation of function
'
ＥＭ
'
－
'
ＯＫ
' or '
ＮＧ
'
Reads emission valid status
'
ＥＳ
'
－
'
０５
' or '
５０
'
Reads emission status (GI-N8)
'
Ｅ０
'
－
'
ＯＫ
' or '
ＮＧ
'
Selects emission current 0.5mA (GI-N8)
'
Ｅ１
'
－
'
ＯＫ
' or '
ＮＧ
'
Selects emission current 0.5mA(GI-N8)
Send back the emission valid. Send back 'ＮＧ' when the filament OFF.
GI-N8 can read about setting and conditons of emission current and at the time, it points
at “05”:0.5mA、“50”：5mA.
11.4.6. Setting the sensitivity
→ Refer to Ｐ．35
Command
Parameter
Response
Explanation of function
‘SA’
－
‘OK’ or ‘NG’
Sets sensitivity factor (N
2
)
‘SB’
－
‘OK’ or ‘NG’
Sets sensitivity factor (A
ｒ
)
‘SE’
‘ X.XX E
±
XX ’
‘OK’ or ‘NG’
Sets sensitivity factor
GI-M2
GI-D7
GI-N8
‘SA’
N2
N2
N2
‘SB’
Ar
Ar
H2
‘SE’
‘X.XXE
±
XX’
‘X.XXE
±
XX’
‘X.XXE
±
XX’
It is memorized, setting of value ‘SE X.XXE±XX ’ by the main body.
It is reflected at the time of the front panel / IO operation.
11.4.7. Setting and reading the set point
→ Refer to Ｐ．37
Command
Parameter
Response
Explanation of function
‘R1’
－
‘ X.XXE-XX ’
Reads data of set point-1
‘R2’
－
‘ X.XXE-XX ’
Reads data of set point-2
‘S1’
‘ X.XXE-XX ’
‘OK’ or ‘NG’
Sets set point-1
‘S2’
‘ X.XXE-XX ’
‘OK’ or ‘NG’
Sets set point-2
‘SP’
－
‘1- X /2- X ’
Read the status of setpoint-1 and -2
Reading of setting and setting value of the set point.
It is reflected at the time of the front panel / IO operation.
The state of the set point is ON： 1, OFF： ０ is set by X of reply data `1-X/2-X'.
11.4.8. Setting analog output
→ Refer to Ｐ．41
Command
Parameter
Response
Explanation of function
‘LI’
－
‘OK’ or ‘NG’
Selects analog “LIN”
‘LG’
－
‘OK’ or ‘NG’
Selects analog “Pseudo-LOG”
‘LH’
－
‘OK’ or ‘NG’
Selects analog “REC-HOLD”
‘L4’
－
‘OK’ or ‘NG’
Selects analog “LOG” (GI-M2)
‘L6’
－
‘OK’ or ‘NG’
Selects analog “GI-D6” compatibility output” (GI-
D7)
‘L3’
－
‘OK’ or ‘NG’
Selects analog “GI-TL3” compatibility output”
(GI-D7)
‘LS’
‘E- XX ’
‘OK’ or ‘NG’
Selects range hold linear output (range)
Set an analog output method.
The set point of the `LS' command sets the range which is ,` E-XX '.
It is reflected at the time of the front panel / IO operation.