Ulvac GI-M2 - X-Ray Function Only ); When Pressure P Activated; When Ext-Protect I Activated; Display When an Error Occurs

24
7.4. X-Ray Function ON/OFF (GI-N8 Only)
→Refer to P.57
ＵＮＤＲ－①
Holding down the F1 key for two seconds
turns on the X-
Ray action. A second
press on the key (for two seconds or more)
turns off the X-Ray action.
The lamp above the F1 key lights
when the X-Ray action is actuated.
Available under a pressure of 3.0 × 10
-
8
Pa (2.0
×
10
-10
Torr) or less.
7.5. When Pressure Protection Is Activated
ＰＲＴ－①
If pressure protection is activated by
pressure rise during measurement and
the filament is turned off, [
Ｅｒｒ． １３
]
will light on the segment indicator.
0 volt is outputted as measurement value.
To make measurement again, press the
ENT key to set up the (MESU-①
statu s)
and check pressure by a Pirani gauge or
other and turn on the filament again.
Refer to STANDARD SPECIFICATION
(P.6) for more imformation.
7.6. When EXT-PROTECT Is Activated
ＰＲＴ－②
If the EXT-PROTECT signal of external input
signal pin 18 is given, the LED marked with ○
in the left figure will light and [
Ｐｒｏ ｔ
]
will light on the segment indicator.
0 volt is outputted as measurement value.
To make measurement again, reset the
external input signal to set up the MESU-
①
status.
7.7.Display when an error occurs
No
Content
Err.11
Filament broken
Err.12
The setting value exceeds the setting range
Err.13
Pressure protect
Err.14
Filament broken during DEGAS
Pa