Ulvac GI-M2 - Values; Example for Sensitivity Set

36
9.1.4.Example for sensitivity set values
The list of the calculation result :Sensitivity of sensor head Srj(N
2
) × relative
sensitivity Ｓｒｊ
Table. 9-1 Sensitivity Factor Reference
GI-M2 ： 0.06 Pa
－１
Molecule Input value Molecule
Input
value
Molecule
Input
value
He
1.33E-02
NH
3
3.87E-02
H
2
S
1.32E-01
Ne
2.15E-02
H
2
O
7.50E-02
HCl
9.90E-02
Ar
8.04E-02
CO
5.70E-02
CO
2
8.10E-02
Kr
1.13E-01
N
2
6.00E-02
N
2
O
9.96E-02
Xe
1.50E-01
NO
7.02E-02
Sfe
1.50E-01
H
2
2.95E-02
O
2
5.27E-02
Hg
1.98E-01
D
2
2.40E-02
Air
5.82E-02
CH
4
9.48E-02
GI-D7 ： 0.083 Pa
－１
Molecule Input value Molecule
Input
value
Molecule
Input
value
He
1.83E-02
NH
3
5.35E-02
H
2
S
1.83E-01
Ne
2.97E-02
H
2
O
1.04E-01
HCl
1.37E-01
Ar
1.11E-01
CO
7.89E-02
CO
2
1.12E-01
Kr
1.56E-01
N
2
8.30E-02
N
2
O
1.38E-01
Xe
2.08E-01
NO
9.71E-02
Sfe
2.08E-01
H
2
4.08E-02
O
2
7.30E-02
Hg
2.74E-01
D
2
3.32E-02
Air
8.05E-02
CH
4
1.31E-01
GI-N8 ： 0.153 Pa
－１
Molecule Input value Molecule Input value Molecule
Input
value
He
3.38E-02
NH
3
9.87E-02
H
2
S
3.37E-01
Ne
5.48E-02
H
2
O
1.91E-01
HCl
2.52E-01
Ar
2.05E-01
CO
1.45E-01
CO
2
2.07E-01
Kr
2.88E-01
N
2
1.53E-01
N
2
O
2.54E-01
Xe
3.83E-01
NO
1.79E-01
Sfe
3.83E-01
H
2
7.52E-02
O
2
1.34E-01
Hg
5.05E-01
D
2
6.12E-02
Air
1.48E-01
CH
4
2.42E-01