Ulvac GI-M2 - Sensor Head Cable (GI-M2); 2,5,10,15 M

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17.3. Sensor head cable（GI-M2）
17.3.1. Sensor head cable (GI-M2) 2,5,10,15m
①
Sensor head side
②
Control side
The figure
from connector fit side
The figure
from connector fit side
Pin
Uses
Pin
Uses
1
Shield(GND)
1
GRID(150V)
2
FIL-1a
2
3
FIL-1com
3
GRID(DEGAS)
4
GRID(DEGAS)
4
Shield(GND)
5
FIL-2com
5
6
FIL-2a
6
7
Shield(GND)
7
FIL-1a
8
GRID(150V)
8
FIL-1com
9
FIL-2com
10
FIL-2a
Fig. 17-6 Sensor head cable connection diagram (GI-M2)
Fig. 17-7 Sensor head cable mouting reference drawing
1
2
Cable use about