Ulvac GI-M2 - GI-TL3 Compatibility Output （GI-D7 Only

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9.6.8.GI-TL3 Compatibility output （GI-D7 Only）
The table below gives the relationship between pressure and output voltage.
Table. 9-12 Measurement value outputs
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
6.00x10
-1
9.56 2.00x10
-3
4.60
4.00x10
-1
9.20 1.00x10
-3
4.00
2.00x10
-1
8.60 6.00x10
-4
3.56
1.00x10
-1
8.00 4.00x10
-4
3.20
6.00x10
-2
7.56 2.00x10
-4
2.60
4.00x10
-2
7.20 1.00x10
-4
2.00
2.00x10
-2
6.60 6.00x10
-5
1.56
1.00x10
-2
6.00 4.00x10
-5
1.20
6.00x10
-3
5.56 2.00x10
-5
0.60
4.00x10
-3
5.20 1.00x10
-5
0.00
Displayed pressure
value (Torr)
Output voltage
(V)
Displayed pressure
value (Torr)
Output voltage
(V)
6.00x10
-３
9.56 2.00x10
-５
4.60
4.00x10
-３
9.20 1.00x10
-５
4.00
2.00x10
-３
8.60 6.00x10
-６
3.56
1.00x10
-３
8.00 4.00x10
-６
3.20
6.00x10
-４
7.56 2.00x10
-６
2.60
4.00x10
-４
7.20 1.00x10
-６
2.00
2.00x10
-４
6.60 6.00x10
-７
1.56
1.00x10
-４
6.00 4.00x10
-７
1.20
6.00x10
-５
5.56 2.00x10
-７
0.60
4.00x10
-５
5.20 1.00x10
-７
0.00
P: Pressure value （Pa）
V: Measured output voltage （V）
P=10
(V/2-5)
（Ｐａ）