Ulvac GI-M2 - Sensor Head GI-D7

87
17.2.2. Sensor head GI-D7
WIT-G1
WIB-G5
WIB-N3
Sensor head model name
Tie-in with vacuum
ＷＩＴ－Ｇ１
φ
１８
Pipe end
φ
１５
Pipe end
ＷＩＢ－Ｇ５
φ
１８
Pipe end
φ
１５
Pipe end
ＷＩＢ－Ｎ３ ＵＦＣ０７０
Flange
Fig. 17-4 Sensor head GI-D7
Φ18(φ15)±0.3
157±3
80±2
17±1
φ50.4±1
G
G
P
P
F
F
A
(
77)
113
±2
13±1
7
0±2
F
F
G
S
F
F
G
Φ57±1
17
±
1
Φ18
(
φ
15)
±0
.
3
Dotted lines show minimum clearance
around the gauge
UFC070
6-φ6.8