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Ulvac GI-M2 - Setting of Set Point 1;2

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29
8.6.Setting of Set Point 1/2
Refer to P.37
Setting of set point 1/2. The set point as follows.
GI-M2
GI-D7
GI-N8
Setiing
range
9.99×10
-0
.00×10
-8
WIT selection
6.79×10
-1
1.00×10
-5
WIB selection
2.00×10
-2
1.00×10
-6
6.60×10
-1
4.00×10
-9
SET1-①
The portion in the left figure blinks
after [
SEt -1
] is displayed for about
1 second.
SET1-②
Each time the [] is pressed, the
numeric value of the blinking portion
changes. When a desired value is
displayed, press the [(ENTER)] key to
transfer control to the set point 2 (SET1-
) status.
Set the SET2 equally successively.
When a desired value is displayed, press
the [
(ENTER)] key to transfer control
to the set point 2 (RAN-
) status.

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