Ulvac GI-M2 - List of Commands

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11.3. List of Commands
Comm
and
Parameter
Response
Explanation of function
‘RE’
－
‘OK’ or ‘NG’
Sets remote status
‘LO’
－
‘OK’ or ‘NG’
Sets local status
‘GS’
－
‘GI-
ｘｘ
’
Reads control status
‘FO’
－
‘OK’ or ‘NG’
Turns OFF filament
‘F1’
－
‘OK’ or ‘NG’
Turns ON filament
‘FA’
－
‘OK’ or ‘NG’
Selects filament - 1
‘FB’
－
‘OK’ or ‘NG’
Selects filament - 2
‘D0’
－
‘OK’ or ‘NG’
Turns OFF degassing
‘D1’
－
‘OK’ or ‘NG’
Turns ON degassing
‘DA’
－
‘OK’ or ‘NG’
Selects degassing AUTO mode use ON
‘DB’
－
‘OK’ or ‘NG’
Selects degassing AUTO mode use OFF
‘DS’
‘ XX ’
‘OK’ or ‘NG’
Sets degassing AUTO mode time in
′
XX
′
minutes
'
ＥＭ
'
－
'
ＯＫ
' or '
ＮＧ
'
Reads emission valid status
'
ＥＳ
'
－
'
０５
' or '
５０
'
Reads emission status (GI-N8)
'
Ｅ０
'
－
'
ＯＫ
' or '
ＮＧ
'
Selects emission current 0.5mA (GI-N8)
'
Ｅ１
'
－
'
ＯＫ
' or '
ＮＧ
'
Selects emission current 0.5mA (GI-N8)
‘SA’
－
‘OK’ or ‘NG’
Sets sensitivity factor (N
2
)
‘SB’
－
‘OK’ or ‘NG’
Sets sensitivity factor (Ar)
‘SE’
‘ X.XX E
±
XX ’’
‘OK’ or ‘NG’
Sets sensitivity factor
‘R1’
－
‘ X.XX E- XX ’’
Reads data of setpoint-1
‘R2’
－
‘ X.XX E- XX ’’
Reads data of setpoint-2
‘S1’
‘ X.XX E- XX ’’
‘OK’ or ‘NG’
Sets setpoint-1
‘S2’
‘ X.XX E- XX ’’
‘OK’ or ‘NG’
Sets setpoint-2
‘SP’
－
‘1- X /2- X
Reads setpoint-1 and -2 status
‘LI’
－
‘OK’ or ‘NG’
Selects analog ″LIN″
‘LG’
－
‘OK’ or ‘NG’
Selects analog ″ Pseudo-LOG″
‘LH’
－
‘OK’ or ‘NG’
Selects analog ″REC-HOLD″
‘L4’
－
‘OK’ or ‘NG’
Selects Analog “LOG output” (GI-M2)
‘L6’
－
‘OK’ or ‘NG’
Selects Analog “GI-D6 compatibility output” (GI-D7)
‘L3’
－
‘OK’ or ‘NG’
Selects Analog “GI-TL3 compatibility output” (GI-D7)
‘LS’
‘E- XX ’
‘OK’ or ‘NG’
Sets range hold linear output value (range)
‘RP’
－
‘X.XXE-XX’
Reads measured pressure data
‘PR’
－
‘ON’ or ‘OF’
Reads EXT-PROTECT status
‘RS’
‘ XXXXXXX ’
Reads action status