Ulvac GI-M2 - GI-D6 Compatibility Output （GI-D7 Only

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9.6.7.GI-D6 Compatibility output （GI-D7 Only）
The table below gives the relationship between pressure and output voltage.
When chose WIT
Table. 9-10 Measurement value outputs
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
9.99x10
-1
4.99
1.00x10
-4
1.10
1.00x10
-1
4.10
5.00x10
-5
0.50
5.00x10
-2
3.50
1.30x10
-5
0.13
1.00x10
-2
3.10
5.00x10
-3
2.50
1.00x10
-3
2.10
5.00x10
-4
1.50
Displayed pressure
value (Torr)
Output voltage
(V)
Displayed pressure
value (Torr)
Output voltage
(V)
9.99x10
-3
4.99
1.00x10
-6
1.10
1.00x10
-3
4.10
5.00x10
-7
0.50
5.00x10
-4
3.50
1.30x10
-7
0.13
1.00x10
-4
3.10
5.00x10
-5
2.50
1.00x10
-5
2.10
5.00x10
-6
1.50
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value （Pa）
V: Measured output voltage （V）
E: V from which decimal point is rounded down （V）
P=10(V-E)×10
-(5-E)
（Ｐａ）