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Ulvac GI-M2 - Reference Diagram of Sensor Cable Installation

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91
17.3.3. Reference diagram of sensor cable installation
100mm or less
R100mm or less
If the weight of the cable is applied to the
probe, this may cause leaks.
It is recommended to fix the cable at 1 m or
less so that the weight of the cable is not
applied to the probe.

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