Ulvac GI-M2 - WIB-N3 Socket Type (GI-D7) 4,10,15,20,25Ｍ; 4,10Ｍ

93
17.4.3.136BWIB-N3 socket type (GI-D7) 4,10,15,20,25ｍ
17.4.4.137BWIN-N2 socket type (GI-N8) 4,10ｍ
17.4.5.138BWIN-N3 socket type (GI-N8) 4,10ｍ
①
Sensor
head side
Pin
②Control side
Pin
Uses
1
1,2
Fil 1
2
18,19
GRID(DEGAS)
3
（
NC
）
4
14,15
GRID(150V)
5
5,6
Fil Com
6
BNC
Ion collector
(Shell)
16,17
Shield
Fig. 17-11 Sensor head cable connection diagram (GI-D7 WIB-N3 socket type)
①
Sensor
head side
Pin
②Control side
Pin
Uses
1
1,2
Fil 1
2
16,17
GRID(150V)
3
16,17
4
(NC)
5
5,6
Fil Com
6
BNC
Iou collector
(Shell)
18,19
Shield
Fig. 17-12 Sensor head cable connection diagram (GI-N8 WIN socket type)
2
1
2
1