Ulvac GI-M2 - Sensor Head GI-N8

88
17.2.3. Sensor head GI-N8
WIN-N2
WIN-N3
Sensor head model name
Tie-in with vacuum
ＷＩＮ－Ｎ３ ＵＦＣ０７０
Flange
ＷＩＮ－Ｎ２ ＵＦＣ０７０
Flange
Fig. 17-5 Sensor head GI-N8
Dotted lines show minimum clearance
around the gauge
UFC070
CMS
6
-φ6.8
Dotted lines show minimum clearance
around the gauge
UFC070
6-φ6.8