Ulvac GI-M2 - WIT Socket Type (GI-D7) 4,10,15,20,25Ｍ; WIB Socket Type (GI-D7) 4,10,15,20,25Ｍ

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17.4.76BSensor head cable （GI-D7/GI-N8）
17.4.1.134BWIT socket type (GI-D7) 4,10,15,20,25ｍ
①
Sensor
head side
Pin
②Control side
Pin
Uses
1
5,6
Fil Com
2
BNC
Ion collector
3
18,19
GRID(DEGAS)
4
14,15
GRID(150V)
5
BNC
Ion collector
6
1,2
Fil 1
(Shell)
16,17
Shield
Fig. 17-9 Sensor head cable connection diagram GI-D7 WIT socket )
17.4.2.135BWIB socket type (GI-D7) 4,10,15,20,25ｍ
①
Sensor
head side
Pin
②Control side
Pin
Uses
1
14,15
GRID(150V)
2
1,2
Fil 1
3
5,6
Fil 1,2 Com
4
18,19
GRID(DEGAS)
5
3,4
Fil 2
6
5,6
Fil 1,2 Com
(Shell)
16,17
Shield
Fig. 17-10 Sensor head cable connection diagram(GI-D7 WIB socket type)
1
2
1
2
3 4
5
6
1
2
1
2
3 4
5
6