Ulvac GI-M2 - Ensor Head; Sensor Head GI-M2

86
17.2. Sensor head
17.2.1.128BSensor head GI-M2
Sensor
head model
name
Tie-in with
vacuum
M-11
φ
18
Pipe end
M-12
φ
15
Pipe end
M-13
UFC034
flange
M-14
NW-16
flange
M-15
NW-25
flange
Fig. 17-2 Sensor heas GI-M2
Fig. 17-3 Sensor head electrode and pin assignment
M-11 M-12
M-13
M-14 M-15