Ulvac GI-M2 - 10 External Inputs;Outputs

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10. EXTERNAL INPUTS/OUTPUTS
Signals are exchanged with outside through the EXT-I/O connector on the rear panel,
except through RS-232C.
Table. 10-1 A list of EXT-I/O functions
Termi
nal
No.
Signal identification
Terminal
direction
Signal contents
１ ＳＥＴ１ ＣＯＭ
Out
Relay output
（AC125V/0.5A、DC24V/1A max）
２ ＳＥＴ１ ａ contact
３ ＳＥＴ１ ｂ contact
４
５ ＥＸＴ－ＯＵＴ ＣＯＭ Out External digital output GND
６ POWER
＿＿
E
ON
E A ／ OFF Out
Reading of ON/OFF of the main power
supply
７ FILAMENT A
＿＿
E
ON
E A ／ OFF Out State reading of the filament
８ EMISSION A
＿＿＿
E
Em-Hi
E A ／ Em-Lo Out The setting reading of the emission current
９ UNIT A
＿＿
E
Pa
E Out The setting reading of the pressure unit
１０ DEGAS A
＿＿
E
ON
E A ／ OFF Out State reading of the DEGAS movement
１１ EMISSION･VALID A
＿＿
E
OK
E A ／ NG Out Validity of emission current
１２
DATA
･
VALID
A
＿＿
E
Lo
E A ／
Hi
Out It works during output data update
１３ PRESSURE･DATA A
＿
E
－
EA／ ＋
Out The pressure value output（BCD outut）
１４ PRESSURE･DATA A
＿＿＿＿
E
Ｃ－b3
E
１５ PRESSURE･DATA A
＿＿＿＿
E
Ｄ－b0
E
１６
１７ DEGAS A
＿＿
E
ON
E A ／ OFF In A control input of the DEGAS movement
１８ EXT-PROTECT A
＿＿
E
ON
E A ／ OFF In Eternal protect input（Forced filament OFF）
１９ EXT- 5V INPUT-COM
In Power supply input for eternal control inputs
２０ EXT-24V INPUT-COM
２１
２２
２３ ＧＮＤ Eternal control input GND（D-GND）
２４ ＧＮＤ （ＲＥＣ－ＯＵＴ － ） Analog output GND（A-GND）
２５ ＲＥＣ－ＯＵＴ ＋ Out The pressure value output （analog output）
２６ ＳＥＴ２ ＣＯＭ
Out
Relay output
（AC125V/0.5A、DC24V/1A max）
２７ ＳＥＴ２ ａ接点
２８ ＳＥＴ２ ｂ接点
２９
３０ PRESSURE･DATA A
＿＿＿＿
E
Ａ－b0
E
Out Pressure output（BCD output）
３１ PRESSURE･DATA A
＿＿＿＿
E
Ａ－b1
E
３２ PRESSURE･DATA A
＿＿＿＿
E
Ａ－b2
E
３３ PRESSURE･DATA A
＿＿＿＿
E
Ａ－b3
E
３４ PRESSURE･DATA A
＿＿＿＿
E
Ｂ－b0
E
３５ PRESSURE･DATA A
＿＿＿＿
E
Ｂ－b1
E
３６ PRESSURE･DATA A
＿＿＿＿
E
Ｂ－b2
E
３７ PRESSURE･DATA A
＿＿＿＿
E
Ｂ－b3
E
３８ PRESSURE･DATA A
＿＿＿＿
E
Ｃ－b0
E
３９ PRESSURE･DATA A
＿＿＿＿
E
Ｃ－b1
E
４０ PRESSURE･DATA A
＿＿＿＿
E
Ｃ－b2
E