Ulvac GI-M2 - Page 52

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Fig. 9-3 Supplementary explanation of output voltage (GI-D7)
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value （Torr）
V: Measured output voltage （V）
E: V from which decimal point is rounded down （V）
GI-D7:
P=10(V-E)×10
-(
７
-E)
（Torr）
0
1
2
3
4
5
6
7
8
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure (Pa)
0
1
2
3
4
5
6
7
1.0E-08 1.0E-07 1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02
Output Voltage (V)
Pressure (Torr)