Ulvac GI-M2 - Page 59

53
When chose ＷＩＢ
Table. 9-11 Measurement value outputs
Displayed pressure
value (Pa)
Output voltage
(V)
Displayed pressure
value (Pa)
Output voltage
(V)
2.00x10
-1
5.20
1.00x10
-4
2.10
1.00x10
-1
5.10
5.00x10
-5
1.50
5.00x10
-2
4.50
1.00x10
-5
1.10
1.00x10
-2
4.10
5.00x10
-6
0.50
5.00x10
-3
3.50
1.30x10
-6
0.13
1.00x10
-3
3.10
5.00x10
-4
2.50
圧力表示値(Torr)
出力電圧(V)
圧力表示値(Torr)
出力電圧(V)
2.00x10
-3
5.20
1.00x10
-6
2.10
1.00x10
-3
5.10
5.00x10
-7
1.50
5.00x10
-4
4.50
1.00x10
-7
1.10
1.00x10
-4
4.10
5.00x10
-8
0.50
5.00x10
-5
3.50
1.30x10
-8
0.13
1.00x10
-5
3.10
5.00x10
-6
2.50
The measurement output voltage can be converted to a pressure value using the following
equation.
P: Pressure value （Pa）
V: Measured output voltage （V）
E: V from which decimal point is rounded down （V）
P=10(V-E)×10
-(6-E)
（Ｐａ）
Fig. 9-8 GI-D6 Compatibility output (WIB)
0
1
2
3
4
5
6
1.0E-06 1.0E-05 1.0E-04 1.0E-03 1.0E-02 1.0E-01 1.0E+00
Output Voltage (V)
Pressure (Pa)