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Ulvac GI-M2 - Page 6

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Revision history
Date
Reason
Sep.11,2008
GI-D7
Analog Output of GI-TL3 Compatibility added
May.12,2009
Correction of errors
Sep.15,2010
Added fuse type
Jun.25,2012
Correction of errors
Apr.5,2013
GI-M2
Added LOG output
Sep.18,2013
Correction of errors
Dec.2,2019
GI-D7
Added Pressure protecting function switching

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