Ulvac GI-M2 - Page 8

2
(REC-HOLD) ....................................... 48
9.6.6. Logarithmic Output (GI-M2) 49
9.6.7. GI-D6 Compatibility output
（GI-D7 Only） ...................................... 51
9.6.8. GI-TL3 Compatibility output
（GI-D7 Only） ...................................... 55
9.7. X-RAY FUNCTION （GI-N8 ONLY）
57
9.7.1. What is X-Ray mode setting? 57
9.7.2. How to actuate X-Ray
function 57
9.8. FILAMENT ACTIVATION（GI-N8
ONLY） .................................................... 58
9.8.1. Actuating conditions ............. 58
9.8.2. Operation .............................. 58
9.8.3. What is filament activation? 58
10. EXTERNAL INPUTS/OUTPUTS .... 59
10.1. SET POINT OUTPUT .................... 61
10.2. EXTERNAL DIGITAL OUTPUT ...... 61
10.3. EXTERNAL CONTROL INPUT ....... 63
10.4. METHOD OF EXTERNAL
CONTROL ................................................. 64
10.5. EXTERNAL PROTECT INPUT (EXT-
PROTECT) .............................................. 64
11. HOW TO USE COMMUNICATION
(RS-232C) ................................................ 65
11.1. COMMUNICATION
SPECIFICATIONS ....................................... 65
11.1.1. Key specifications ................. 65
11.1.2. Baud rate setting .................. 65
11.1.3. Communication
cable/connector .................................... 65
11.2. SEND COMMAND FORMAT .......... 65
11.3. LIST OF COMMANDS ................... 66
11.4. EXPLANATION OF COMMAND
ACTION 67
11.4.1. Changing over remote/local
control 67
11.4.2. Reading the connection
model 67
11.4.3. Control of filament................ 67
11.4.4. Control of degassing ............. 67
11.4.5. Reading the emission valid
signal 68
11.4.6. Setting the sensitivity .......... 68
11.4.7. Setting and reading the set
point 68
11.4.8. Setting analog output ........... 68
11.4.9. Reading the measured
pressure value and action status ........ 69
11.5. CAUTIONS IN OPERATION ........... 69
12. TROUBLESHOOTING .................. 70
12.1. CAUSES OF NO EMISSION
CURRENT AND CORRECTIVE ACTIONS ....... 78
13. APPENDIX ................................... 79
13.1. PRINCIPLES OF OPERATION ........ 79
13.2. TYPE OF MEASURABLE GAS AND
SPECIFIC SENSITIVITY FACTOR ................. 80
14. WARRANTY ................................. 82
15. CERTIFICATE OF
CONTAMINATION ................................. 83
16. CHINA ROHS DECLARATION ..... 84
17. RELATED DRAWINGS ................. 85
17.1. ION GAUGE................................. 85
17.2. SENSOR HEAD ............................ 86
17.2.1. Sensor head GI-M2 ............... 86
17.2.2. Sensor head GI-D7 ............... 87
17.2.3. Sensor head GI-N8 ............... 88
17.3. SENSOR HEAD CABLE（GI-M2） 89
17.3.1. Sensor head cable (GI-M2)
2,5,10,15m ........................................... 89
17.3.2. Sensor head cable (GI-M2) long
cable side ............................................. 90
17.3.3. Reference diagram of sensor
cable installation ................................. 91
17.4. SENSOR HEAD CABLE （GI-D7/GI-
N8） 92
17.4.1. WIT socket type (GI-D7)
4,10,15,20,25ｍ .................................... 92
17.4.2. WIB socket type (GI-D7)
4,10,15,20,25ｍ .................................... 92
17.4.3. WIB-N3 socket type (GI-D7)
4,10,15,20,25ｍ .................................... 93
17.4.4. WIN-N2 socket type (GI-N8)
4,10ｍ 93
17.4.5. WIN-N3 socket type (GI-N8)
4,10ｍ 93
17.4.6. WIB Pin socket type (GI-D7)
4,10,15,20,25ｍ .................................... 94
17.4.7. WIN-G Pin socket type (GI-N8)
4,10ｍ 94
17.4.8. Sensor head cable （GI-D7/GI-
N8） Long cable ................................... 95