Page 270 2000-1252-01 Released Rev. C
VersaPort 2200 Technical Manual
a
interlocks 9
SECS 138
CEID, list 152
message summary 140
stream and function codes 142
seismic, information 10
sensors 23
cassette slot 25
excessive wafer protrusion 26
list of 23
wafer present 25
wafer protrusion 26
serial communication
configuring
137
service
calibration/alignment procedures (CAP)
63
corrective service procedures (CSP) 98
preventive service procedures (PSP) 60
software
communications
123, 137
see also ASCII, SECS, FLSIM
specifications
33
stream and function codes, SECS 142
T
trademarks iii
training iii
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