Inficon Cygnus 2 User Manual

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Cygnus 2 Operating Manual
Time Limit (in Deposit) . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
Rate Filter Time . . . . . . . . . . . . . . . . . . . . . . 0.1, 0.4, 1.0, 4.0, or 10.0, 20.0, 30.0 s
Time Power Averaging Time . . . . . . . . . . . . 0 to 30 minutes
Ion Assist Deposit. . . . . . . . . . . . . . . . . . . . . Yes/No
On Final Thickness. . . . . . . . . . . . . . . . . . . . Continue, Post-Dep(osit),
NonDep(osit)Cont(rol)
New Rate while in Deposit . . . . . . . . . . . . . . 2 Rate Ramps per Material
New Rate 1 or 2 . . . . . . . . . . . . . . . . . . . 0.000 to 999.9 Å/s
Start Ramp 1 or 2. . . . . . . . . . . . . . . . . . 0.000 to 999.9 kÅ
Ramp Time 1 or 2. . . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
RateWatcher
®
. . . . . . . . . . . . . . . . . . . . . . Sample and Hold Feature
(RateWatcher) Option. . . . . . . . . . . . . . . Yes/No
(RateWatcher) Time . . . . . . . . . . . . . . . . 00:00 to 99:59 min:s
(RateWatcher) Accuracy. . . . . . . . . . . . . 1 to 99%
(Sensor) Failure Action. . . . . . . . . . . . . . . . . PostD(e)p(osit), Stop All, Stop Matl,
TimeP(o)w(er)
CrystalTwo Tooling . . . . . . . . . . . . . . . . . . . . 1.0 to 999.9%
CrystalSix (XtalSix) and Crystal12 (Xtal12) sensor selections to specify a subset of
available crystal positions:
Xtal Position First . . . . . . . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)
Xtal Position Last . . . . . . . . . . . . . . . . . . 0 to 6 (XtalSix) or 12 (Xtal12)
(Crystal) Quality Percent . . . . . . . . . . . . . . . 0 to 99%
(Crystal) Quality Counts . . . . . . . . . . . . . . . . 0 to 99
(Crystal) Stability Single . . . . . . . . . . . . . . . . 0 to 9999 Hz
(Crystal) Stability Total . . . . . . . . . . . . . . . . . 0 to 9999 Hz
Recorder Output. . . . . . . . . . . . . . . . . . . . . . 0 to 12
Recorder Function . . . . . . . . . . . . . . . . . . . . Rate, Thick(ness), RateDev(iation),
Power
Recorder Range. . . . . . . . . . . . . . . . . . . . . . 0 to 99999
Final Thick(ness) . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ
Thick(ness) Limit . . . . . . . . . . . . . . . . . . . . . 0.000 to 999.99 kÅ
Cruc(ible) . . . . . . . . . . . . . . . . . . . . . . . . . . . 1 to 64

Inficon Cygnus 2 Specifications

General

Brand	Inficon
Model	Cygnus 2
Category	Controller
Language	English