kruss DSA100 - Mounting Axes and Tables; Axis Order and Height Compensation

Mounting axes page 31
7 Mounting axes
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Usually the axes are already assembled when the instrument is delivered. This
chapter describes the assembly of axes or tables that were acquired afterwards.
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7.1 Order of the axes and height compensation with spacers
Up to three axes, manual or software-controlled, can be assembled on the frame.
Setup with one vertical axis and two horizontal axes
Base Spacer
x-Axis
y-Axis
z-Axis (lifting table)
Sample table
Alternative setups
 Not mounted x- or y- axes are replaced by an additional spacer respectively.
 Instead of an x-axis, a rotating table (wafer table) can be mounted. The wafer
table is mounted onto a z-axis.
 Instead of a sample table, an environmental chamber (temperature chamber,
humidity control) may be mounted.
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