page 40 Mounting axes
9. Fix the fixing strips with four screws lightly so that the axis can still be moved.
Move the whole axis so that the spacer is located in the centre of the range of
movement of the axis.
10. Fix the strips.
Tighten up the screws in sequence to achieve uniform stress and avoid
tilting.
7.5.2 Mounting a wafer table ST3220/3270
Place the wafer table on the sample table. The wafer table must be attached
with four hexagon socket screws (4 X 8 mm). Rotate the wafer table manually
and use the gap in order to screw in the screws.
To Next Page
Loading...
Need help?
General
