Strasbaugh Mechanical Maintenance Procedures
Version 1.2 - April 18, 1996 7 - 5
1 - work chuck jog speed fast/slow
4 - work chuck rinse (then press "f" to scrub work chuck)
[+/-] - turn work chuck vacuum on/off
[.] - raise/lower grind hood door
The grind wheel spindle will rise to a safe height above the
wafer chuck once the [R] key is pressed to exit the manual jog
mode.
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