Strasbaugh Mechanical Maintenance Procedures
Version 1.2 - April 18, 1996 7 - 11
WORK CHUCK REPLACEMENT
The work chuck is a porous ceramic material bonded to a
stainless steel mounting flange. The chuck has approximately
5/8" of usable depth. Once the chuck surface is low enough the
wheels and/or pick and place chucks will no longer reach the
wafer. Alternately, the ceramic media may eventually clog
before the usable depth is consumed. In either case chuck
replacement is required.
To remove the chuck loosen the four socket head cap screws
around the perimeter of the work chuck flange. After removing
the four screws the chuck should rotate freely. Due to the
flatness of the mating surfaces the chuck will not lift off the
mounting surface easily. To assist in removing the chuck the
blowoff can be activated by pushing down the pick and place 2
chuck and releasing. Lifting and rotating the chuck with
backflush pressure should release the chuck.
To install a new chuck clean both surfaces thoroughly and
secure the new chuck with the four mounting screws. A new
chuck must be ground after installation to true the chuck
surface to the machine.
To Next Page
Loading...