Operation and Maintenance Manual Model 7AA Wafer Grinder
10 - 8 Version 1.2 - April 18, 1996
SERVO ERROR CODES
0000 This code appears in the upper left-hand corner of the
CRT and displays information concerning the condition
of the 2 servo axes. There are 4 software flags, a "1" in
any of the 4 positions indicate a error condition.
1000 This software flag "AXIS 1 LOSS OF FEEDBACK" (axis
1 is the X axis, controlling the work chuck position)
indicates the controller cannot understand the
information sent back from the feedback device
(resolver). There are 2 main causes for this error:
1) The resolver is not connected to the
controller.
Check resolver and connectors.
2) The signal from the resolver is noisy.
Check routing of resolver cable,
maintain a minimum of 4" from high
voltage/frequency lines.
0100 This software flag "AXIS 2 LOSS OF FEEDBACK" (axis
2 is the Z axis, controlling the grind spindle height)
indicates the controller cannot understand the
information sent back from the feedback device
(resolver). There are 2 main causes for this error:
1) The resolver is not connected to the
controller.
Check resolver and connectors.
2) The signal from the resolver is noisy.
Check routing of resolver cable,
maintain a minimum of 4" from high
voltage/frequency lines.
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