Operation and Maintenance Manual Model 7AA Wafer Grinder
7 - 4 Version 1.2 - April 18, 1996
MANUAL CONTROL OF
MACHINE
The manual jog mode provides manual operator control of both
servo axes and the pick and place rotation. These functions
are normally used to assist in maintaining and servicing the
machine.
Since machine motion is controlled manually the possibility of
machine damage exists. Care should be taken to prevent the
wafer chuck from hitting the grind wheels while the chuck is in
motion.
As a warning to the operator the beeper will sound if the
work chuck is moving toward the grinding wheels while the
possibility of a collision exists. However, this is only a
conditional function and cannot be considered as a
verification that the possibility of damage does or does not
exist! Also, this function is only valid if the machine has
first been initialized properly.
To display the machine operation menu, press the reset key.
Turn the key switch to "Man" and press the "5" key. This will
display the manual jog mode menu. keys "A" through "F" are
used for manual motion control as explained below:
A - move work chuck in (increase position coordinate)
B - move grind spindle up (increase position coordinate)
C - move work chuck out (decrease position coordinate)
D - move pick and place counterclockwise
E - move grind spindle down(decrease position coordinate)
F - move pick and place clockwise
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