Operation and Maintenance Manual Model 7AA Wafer Grinder
6 - 4 Version 1.2 - April 18, 1996
WEEKLY PREVENTIVE
MAINTENANCE SCHEDULE
Date: ________________
Machine Number: ________________
Fab Number: ________________
Tech Initials
1. Complete daily P.M. _______
2. Clean all optical and capacitive sensors on elevators. _______
3. Clean optical fibers at measure station. _______
4. Clean optical fibers at pick-up station. _______
5. Check work chuck drive belt and pulley. _______
6. Check for lubrication on ways and ball screw. _______
7. Check D.I. water pressure, min. 30 psi. _______
8. Incoming air pressure, 85-95 psi. _______
9. Air pressure drop across filters < 10 psi. _______
10.Clean front cover and panels. _______
11. Vacuum up chips in spin chamber. _______
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